| Principal Software Engineer 1 | 5 | $206,550 | $206,550–$230,900 |
| Product Manager 3 | 5 | $180,648 | $180,200–$217,562 |
| Senior Cs Site Manager 1 | 5 | $179,338 | $179,338–$181,314 |
| Senior Software Engineer 2 | 62 | $178,252 | $165,927–$199,534 |
| Senior Electron Optics Engineer 2 | 5 | $176,375 | $176,375–$176,375 |
| Senior Design Engineer 2 - Software | 15 | $166,705 | $158,923–$172,651 |
| Technical Project Manager 2 | 7 | $165,000 | $159,850–$175,720 |
| Software Architect 3 | 21 | $164,313 | $160,650–$176,375 |
| Design Engineering And Architecture Line Manager Gl 1 | 6 | $160,243 | $148,061–$161,060 |
| Senior Electrical Engineer 2 | 10 | $159,890 | $142,750–$183,622 |
| Senior Optical Sensing Engineer 2 | 7 | $158,950 | $158,950–$186,576 |
| Design Engineering And Architecture Line Manager 1 | 6 | $156,508 | $151,523–$160,210 |
| Senior Electron Optics Engineer 1 | 5 | $153,254 | $145,288–$163,388 |
| Senior It Applications Engineer 2 | 9 | $152,027 | $133,370–$160,065 |
| Senior Software Engineer | 5 | $150,000 | $137,789–$154,549 |
| Mechatronics Architect 3 | 11 | $149,175 | $135,812–$164,475 |
| Technical Project Manager 1 | 50 | $147,900 | $134,863–$164,724 |
| Senior Software Engineer 1 | 218 | $147,475 | $146,200–$172,931 |
| Software Architect 2 | 11 | $147,475 | $140,452–$161,720 |
| Optical Sensing Architect 3 | 5 | $144,000 | $144,000–$158,382 |
| Sr. Design Engineer 1 - Software | 8 | $142,461 | $139,391–$148,809 |
| Senior On Product Performance Engineer 1 | 6 | $140,920 | $137,176–$151,349 |
| Senior Design Engineer 1 - Software | 48 | $139,922 | $135,458–$152,190 |
| Senior Applications Engineer 2 | 9 | $139,400 | $132,246–$151,775 |
| Mechanical Architect 3 | 5 | $138,125 | $134,300–$146,795 |
| Lithography System Performance Architect 3 | 6 | $135,812 | $133,277–$142,868 |
| Senior System Industrialisation Engineer 2 | 5 | $130,475 | $129,200–$159,785 |
| Senior Data Scientist 1 | 7 | $130,395 | $117,098–$137,820 |
| Senior Electrical Engineer 1 | 39 | $130,125 | $122,249–$154,119 |
| Senior Researcher 1 | 11 | $129,625 | $128,350–$133,203 |
| Senior Mechanical Engineer 2 | 11 | $129,200 | $128,113–$154,134 |
| Senior Design Engineer 1 - Software Qa | 8 | $129,118 | $128,455–$136,336 |
| Senior Optical Sensing Engineer 1 | 26 | $128,904 | $118,934–$134,769 |
| Senior Optical Engineer 1 | 15 | $127,171 | $114,450–$137,546 |
| Senior Cs Technical Support Engineer 1 | 14 | $126,988 | $118,116–$129,625 |
| Senior Mechatronics Engineer 1 | 53 | $126,048 | $118,934–$133,203 |
| Senior It Applications Engineer 1 | 12 | $125,892 | $119,933–$141,262 |
| Mechatronics Architect 2 | 8 | $122,572 | $119,425–$135,242 |
| Technical Project Lead 2 | 56 | $120,700 | $116,025–$135,304 |
| Senior Applications Engineer 1 | 16 | $120,350 | $109,012–$153,254 |
| Main Delivery Owner 3 | 25 | $120,000 | $108,000–$120,700 |
| Mechanical Architect 2 | 10 | $119,425 | $119,288–$129,625 |
| Senior Plasma And Laser Physics Engineer 1 | 8 | $119,425 | $119,425–$126,947 |
| Function System Engineer 1 | 6 | $119,425 | $119,425–$120,062 |
| Software Engineer 3 | 98 | $119,000 | $117,725–$141,378 |
| Senior System Integration And Test Engineer 1 | 15 | $117,645 | $110,770–$144,040 |
| Design Engineer 3 | 6 | $117,500 | $112,546–$135,555 |
| Cs Line Manager 1 | 6 | $117,300 | $114,825–$143,474 |
| Senior Design Engineer 1 - Optical | 6 | $116,976 | $110,356–$120,177 |
| Senior System Industrialisation Engineer 1 | 29 | $116,626 | $112,625–$145,205 |
| Senior Cs Competence Engineer 1 | 6 | $116,238 | $113,944–$124,456 |
| Senior Design Engineer 1 | 18 | $115,657 | $110,500–$139,499 |
| Senior Heat And Mass Transfer Engineer 1 | 6 | $115,371 | $111,350–$119,696 |
| Senior Materials And Conditioning Engineer 1 | 15 | $114,296 | $112,398–$144,664 |
| Change Expert 2 | 7 | $113,963 | $110,406–$129,251 |
| Senior Mechanical Engineer 1 | 32 | $113,547 | $111,350–$128,524 |
| Senior Lithography System Performance Engineer 1 | 8 | $113,547 | $111,192–$124,932 |
| Design Engineer 2 - Software | 30 | $113,500 | $106,440–$129,255 |
| Senior Project Leader - Engineering | 8 | $113,353 | $109,020–$119,529 |
| Senior Quality Engineer 1 | 18 | $111,842 | $110,084–$119,807 |
| Senior Design Engineer 1 - Mechanical | 7 | $110,000 | $107,500–$122,000 |
| Project Lead 2 | 6 | $109,862 | $97,006–$135,408 |
| Senior Cs Tl 2 | 8 | $108,375 | $107,754–$130,456 |
| Design Engineer 2 - Software Qa | 6 | $106,502 | $104,251–$117,270 |
| Senior Design Engineer 1 - Mechatronics | 10 | $106,182 | $100,878–$113,950 |
| Senior Supply Chain Engineer 1 | 20 | $104,975 | $101,150–$110,500 |
| Senior Finance Specialist 2 | 6 | $104,874 | $98,399–$114,472 |
| Optical Sensing Engineer 3 | 7 | $104,346 | $102,000–$111,159 |
| Software Engineer 2 | 24 | $103,293 | $96,845–$117,333 |
| Electrical Engineer 3 | 46 | $103,018 | $99,195–$114,275 |
| Cs Technical Support Engineer 3 | 33 | $102,850 | $92,650–$109,619 |
| Optical Engineer 3 | 6 | $102,826 | $100,068–$116,158 |
| Cs Competence Engineer 3 | 16 | $100,962 | $92,625–$102,850 |
| Mechatronics Engineer 3 | 49 | $99,424 | $99,424–$112,403 |
| Competence Engineer 3 | 10 | $98,467 | $86,666–$120,382 |
| Senior Field Service Engineer 1 | 33 | $97,781 | $90,061–$107,586 |
| Mechanical Engineer 3 | 60 | $97,521 | $89,906–$106,142 |
| System Integration And Test Engineer 3 | 32 | $97,323 | $94,718–$102,943 |
| Main Delivery Owner 2 | 7 | $97,323 | $96,050–$105,515 |
| Senior Upgrade Install And Relocation Engineer 1 | 5 | $96,957 | $86,700–$104,312 |
| Gsc Engineer 2 | 11 | $96,758 | $92,628–$112,456 |
| Technical Support Engineer 2 | 5 | $96,532 | $93,000–$110,444 |
| Technical Project Lead 1 | 22 | $95,625 | $91,693–$96,475 |
| Senior Business Planner 1 | 5 | $95,285 | $95,285–$112,902 |
| Electrical Engineer 2 | 5 | $94,910 | $86,050–$98,623 |
| System Industrialisation Engineer 3 | 34 | $94,765 | $91,894–$104,606 |
| Field Application Engineer 2 | 5 | $93,740 | $93,480–$97,023 |
| Design Engineer 2 - Mechatronics | 10 | $92,500 | $90,000–$95,580 |
| Design Engineer 2 - Mechanical | 12 | $91,518 | $89,014–$97,900 |
| Design Engineer 2 | 14 | $91,308 | $85,744–$114,100 |
| Design Engineer 1 - Software | 8 | $91,000 | $84,994–$96,531 |
| Field Generalist 3 | 9 | $90,272 | $86,700–$98,842 |
| Production Engineer 4 | 12 | $90,000 | $89,211–$96,408 |
| Competence Engineer 2 | 11 | $88,400 | $86,106–$91,527 |
| Cs Technical Support Engineer 2 | 11 | $87,818 | $86,341–$89,232 |
| Applications Engineer 3 | 27 | $87,550 | $86,700–$104,026 |
| Field Service Engineer 3 | 19 | $87,090 | $83,720–$87,300 |
| Field Generalist 2 | 5 | $87,090 | $84,136–$93,001 |
| Senior Plm Project Coordinator 1 | 6 | $86,029 | $82,098–$86,029 |
| Design Engineer 2 - Production | 5 | $85,000 | $80,000–$120,886 |
| Business Engineer 4 | 8 | $84,334 | $82,867–$86,994 |
| Upgrade Install And Relocation Engineer 3 | 15 | $84,136 | $79,987–$92,156 |
| System Integration And Test Engineer 2 | 11 | $77,875 | $77,667–$79,810 |
| Upgrade Install And Relocation Engineer 2 | 8 | $75,733 | $75,474–$81,153 |
| Field Service Engineer 2 | 5 | $75,005 | $74,981–$77,476 |
| Plm Coordinator 2 | 10 | $72,634 | $71,864–$92,256 |
| Operational Planner 3 | 14 | $72,498 | $64,422–$79,909 |
| Design Engineer 1 - Production | 7 | $72,000 | $68,850–$75,734 |